Reduction of hillocks prior to dielectric barrier deposition in Cu damascene

ABSTRACT

Unwanted hillocks arising in copper layers due to formation of overlying barrier layers may be significantly reduced by optimizing various process parameters, alone or in combination. A first set of process parameters may be controlled to pre-condition the processing chamber in which the barrier layer is deposited. A second set of process parameters may be controlled to minimize energy to which a copper layer is exposed during removal of CuO prior to barrier deposition. A third set of process parameters may be controlled to minimize the thermal budget after removal of the copper oxide.

BACKGROUND OF THE INVENTION

[0001] Due to its relatively low resistance and cost, copper is findingincreasing use as a conductive layer in the interconnect metallizationstructures of integrated circuits and other semiconductor devices. FIGS.1A-1E show simplified cross-sectional views of conventional steps forfabricating a damascene interconnect structure utilizing coppermetallization.

[0002] In FIG. 1A, an interlayer dielectric (ILD) 100 is formed over afirst conducting layer 102 and then patterned to create opening 104.While opening 104 is generically shown in FIG. 1A as a via hole, in dualdamascene approaches the opening can take the more complex form of atrench overlying a narrower via hole.

[0003] In FIG. 1B, a first barrier layer 106 is formed within opening104 and over patterned ILD 100. Barrier layer 106 may be formed from avariety of materials, including but not limited to SiN, TiN, Ta, TaN,Ta/TaN, as well as the barrier low k (BLOK®) material manufactured byApplied Materials, Inc. of Santa Clara, Calif. The primary function ofthe barrier layer is to block diffusion of copper of the metallizationstructure. ILD 100 and barrier layer 106 may be formed by suchtechniques such as chemical vapor deposition, as performed by thePRODUCER® tool manufactured by Applied Materials, Inc. of Santa Clara,Calif.

[0004] In FIG. 1C, copper metal interconnect 108 is formed over firstbarrier layer 106, within opening 104 and over the top of ILD layer 100.The copper metal 108 may be formed by such techniques as electroplating,for example as is performed by the ELECTRA CU™ tool manufactured byApplied Materials, Inc. of Santa Clara, Calif.

[0005] In FIG. 1D, the wafer is removed from the electroplating deviceand transferred to a chemical mechanical polishing tool for removal ofcopper metal 108 and barrier layer 106 outside of the now-filled openingin ILD 100, resulting in the formation of conducting copper viastructure 110. In FIG. 1E, the wafer is transferred from the chemicalmechanical polishing module to a chemical vapor deposition (CVD) modulefor formation of second barrier layer 112 over copper via 110. Thefunction of second barrier layer 112 to block any upward diffusion ofcopper metal from the via into successive dielectric layers of theinterconnect structure.

[0006] The process sequence shown and described above in connection withFIGS. 1A-1E can be repeated to form additional metallization layersoverlying and in contact with copper via 110.

[0007] The process flow just shown and described is somewhat simplified.For example, FIGS. 1CA-CC show detailed and enlarged views of thefabrication steps leading up to creation of the copper via shown in FIG.1D. Specifically, removal of excess copper metal during the CMP stepshown in FIG. 1C may be performed under oxidizing conditions. Thus, asshown in FIG. 1CB, at the conclusion of the CMP step and prior toformation of the second barrier layer, a thin copper oxide layer 114typically overlies copper via plug 110. Formation of such a copper oxidelayer is not necessarily the result of CMP performed under oxidizingconditions, and copper oxide may also result from exposing the processedwafer to air, as may occur during transfer of the wafer betweendifferent processing tools.

[0008] Because this copper oxide layer 114 is a dielectric material, itcan degrade the conductive properties of the interconnect metallizationTherefore, as shown in FIG. 1CC, the metallization layer may be exposedto a reactive ionized species from a plasma to remove the copper oxideprior to formation of the top barrier layer and additional portions ofthe interconnect structure. The oxide removal plasma may be generated ingases such as NH₃ mixed with a carrier gas comprising N₂. The oxideremoval plasma may be generated remote from the chamber or generatedwithin the chamber. This plasma exposure may take place in the samechamber in which the upper barrier layer is subsequently deposited.Methods and apparatuses for removing copper oxide are described indetail in U.S. Pat. No. 6,365,518, coassigned with the present inventionand hereby incorporated by reference for all purposes.

[0009] Another detail not shown in the generalized FIGS. 1A-E is thepotential undesirable formation of hillocks in the copper metallizationlayer. Hillock formation is shown and described in connection with FIGS.1DA-1DC.

[0010] FIG.1DA shows a cross-sectional view of the interconnectstructure after removal of the CuO layer by plasma exposure followingremoval of the unwanted CuO layer. As shown in FIG. 1DB, hillocks 108 amay undesirably grow out of the plane of the copper layer 108 prior toor during formation of the upper barrier layer. The growth and presenceof hillocks 108 a can create issues regarding performance of theinterconnect structure, such as elevated electrical resistance and/orshorting.

[0011] Therefore, there is a need in the art for methods and apparatuseswhich reduce the incidence of hillock formation during the fabricationof copper metallization structures.

BRIEF SUMMARY OF THE INVENTION

[0012] Unwanted hillocks arising in copper due to formation of overlyingbarrier layers may be significantly reduced by optimizing variousprocess parameters, alone or in combination. A first set of processparameters may be controlled to pre-condition the processing chamber inwhich the barrier layer is deposited. A second set of process parametersmay be controlled to minimize energy to which a copper layer is exposedduring removal of CuO prior to barrier deposition. A third set ofprocess parameters may be controlled to minimize the thermal budgetafter removal of the copper oxide.

[0013] An embodiment of method of preconditioning a processing chamberthat is to be utilized to form a barrier layer on top of a copper layercomprises, causing a seasoning layer consisting of silicon oxide to bedeposited on exposed surfaces of a processing chamber prior tointroduction of a substrate bearing a copper layer.

[0014] Another embodiment of a method of preconditioning a processingchamber that is to be utilized to form a barrier layer on top of acopper layer comprises exposing a processing chamber to a plasma priorto prior to introduction of a substrate bearing a copper layer.

[0015] Another embodiment of a method of preconditioning a processingchamber that is to be utilized to form a barrier layer on top of acopper layer, comprises causing a seasoning layer consisting of siliconoxide to be deposited on exposed surfaces of a processing chamber priorto introduction of a substrate bearing a copper layer. The seasoninglayer is exposed to a plasma prior to introduction of a substratebearing a copper layer.

[0016] An embodiment of a substrate processing apparatus in accordancewith the present invention comprises a processing chamber and a gasdistribution system configured to receive and deliver gases to a gasdistribution face plate located proximate to the substrate heater in theprocessing chamber. A substrate heater is configured to support asubstrate within the processing chamber and moveable relative to the gasdistribution face plate. A controller is configured to control the gasdelivery system, the RF power system, and the substrate support. Amemory, coupled to the controller, comprises a computer-readable mediumhaving a computer-readable program embodied therein for directingoperation of the substrate processing apparatus. The computer-readableprogram includes a first set of instructions for controlling the gasdelivery system to deliver to the gas distribution face plate a firstgas flow resulting in formation of a seasoning layer consisting ofsilicon oxide in the chamber and prior to insertion of a substrate intothe chamber.

[0017] A further understanding of embodiments in accordance with thepresent invention can be made by way of reference to the ensuingdetailed description taken in conjunction with the accompanyingdrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0018] FIGS. 1A-E show simplified cross-sectional views of steps of aconventional process flow for forming a copper Damascene interconnectstructure.

[0019] FIGS. 1CA-1CC and 1DA-1DC show detailed, enlarged cross-sectionalviews of certain of the steps of the conventional process flow shown inFIGS. 1A-1E.

[0020]FIGS. 2A and 2B are atomic force micrographs of a blanket Cu layershowing hillock formation.

[0021]FIG. 3 is a simplified flow chart illustrating post-Cu formationsteps that may give rise to hillock formation.

[0022] FIGS. 4A-B shows optical micrographs of wafers bearing blanket Culayers coated with deposited nitride, in seasoned chambers that have orhave not been exposed to post-seasoning plasma treatment.

[0023] FIGS. 5A-B show optical micrographs of wafers bearing blanket Culayers coated with deposited nitride, that have or have not been placedinto direct contact with the wafer heater during gas flow stabilization.

[0024] FIGS. 6A-D show optical micrographs of wafers bearing blanket Culayers coated with deposited nitride, after exposure of the Cu layers toplasma under various pressures and gas distribution faceplate to waferspacings.

[0025]FIG. 7A-B show atomic force micrographs of wafers bearing blanketCu layers after exposure to plasma for different durations to removeCuO.

[0026] FIGS. 8A-D show optical micrographs of wafers bearing a blanketCu layer coated with deposited nitride, after exposure of the Cu layerto plasma formed in different gases.

[0027] FIGS. 9A-D show optical micrographs of wafers bearing a blanketCu layer coated with a deposited nitride layer, after exposure of the Culayer to plasma formed in different gases.

[0028] FIGS. 10A-D show optical micrographs of the surfaces of wafersexposed to different process conditions.

[0029] FIGS. 11A-B show optical micrographs of wafers bearing a nitridebarrier deposited over a Cu blanket layer at different temperatures.

[0030]FIG. 12A shows a simplified cross-sectional view of one embodimentof a PECVD apparatus.

[0031]FIG. 12B is an illustrative block diagram of the hierarchicalcontrol structure of the system control software according to a specificembodiment.

DETAILED DESCRIPTION OF THE INVENTION

[0032] Unwanted formation of hillocks in copper layers during thefabrication of semiconductor devices may be reduced in accordance withembodiments of the present invention by carefully controlling a numberof process parameters, alone or in combination. A first set of processparameters may be controlled to pre-condition the barrier layerdeposition chamber prior to its receiving a wafer bearing a copperlayer. A second set of process parameters may be controlled to minimizethe energy to which the copper layer is exposed during removal of copperoxide prior to deposition of the barrier layer. A third set of processparameters may be controlled to minimize the thermal budget that thecopper layer is exposed to after removal of the copper oxide. Controlover each of these sets of parameters is discussed in detail below.

[0033] I. Reduction of Hillock Formation in Copper Layers

[0034] Research has indicated that the formation of hillocks in copperlayers may be attributable to diffusion of copper along grain boundariesof the metallization layer in response to stress. Stress resulting inhillock formation may be imparted to the copper grains throughapplication of thermal or other types of energy. Grains of the Cu layermay in turn release this stress by diffusing along grain boundaries andgrowing out of the plane of the copper layer to form the unwantedhillock features.

[0035] The formation of hillocks in copper is illustrated in FIG. 2A,which shows an atomic force micrograph at a scan size of 25μ×25μ of thesurface of a wafer bearing a blanket copper layer which has beenannealed at 330° C. for 60 seconds. FIG. 2B shows an atomic forcemicrograph for the same wafer at a scan size of 5μ×5μ. The hillocksshown in FIGS. 2A-B are formed as the copper layer relaxes in responseto the application of stress.

[0036] One source of such stress-inducing energy may be a semiconductorfabrication process occurring after initial formation of the Cu layer.FIG. 3 shows a flow chart of a series of processing steps that may takeplace after Cu is deposited on a substrate.

[0037] In step 300, a copper layer is deposited on a wafer or substrate.In step 302, the wafer bearing the copper layer is exposed to chemicalmechanical polishing conditions, which may result in formation of alayer of oxide over the copper.

[0038] In steps 304 a-b, a chamber in which deposition of a barrierlayer is to take place is conditioned in preparation to receive thecopper-bearing substrate. Specifically, in step 304 a the chamber isseasoned. In step 304 b the chamber may be exposed to a plasma forcleaning purposes. The chamber seasoning and cleaning steps areindependent in nature, and substrate processing may occur with either,none, or both steps 304 a and 304 b having been performed.

[0039] In step 306, the substrate is inserted into conditioneddeposition chamber. In step 308, flow rates of gases to the depositionchamber are stabilized. In step 310, the stable flow of gases is excitedby exposure to a plasma, such that oxide overlying the copper layer isremoved. In step 312, the oxide removal plasma is replaced by a plasmacontaining reactive gases which react to deposit a barrier layer overthe copper layer on the substrate.

[0040] As discussed in detail below, in accordance with embodiments ofthe present invention, at one or more points during the process shown inFIG. 3, the processing parameters may be altered to reduce the incidenceof hillock formation in the copper layer.

[0041] A. Barrier Layer Deposition Chamber Pre-Conditioning

[0042] Returning to step 306 of FIG. 3, following the chemicalmechanical planarization of the copper layer, the wafer is transferredto a different chamber to form the overlying barrier layer by chemicalvapor deposition. By employing certain chamber pre-conditioning stepsalone or in combination, prior to the wafer entering the barrier layerdeposition chamber, the incidence of hillock formation can besignificantly reduced.

[0043] One such chamber pre-conditioning step in accordance with anembodiment of the present invention is formation of a silicon oxideseasoning layer within the CVD chamber after cleaning, as shown in step304 a of FIG. 3. Conventionally, where a layer of silicon nitride is tobe deposited on a substrate positioned within a chamber, a seasoninglayer is first deposited within the empty chamber. This seasoning layerserves to entrap various particles and contamination already presentwithin the chamber, preventing them from falling onto and compromisingthe substrate. Where a silicon nitride barrier layer is to be depositedwithin the chamber, the seasoning layer typically comprises siliconnitride alone, or as a part of a stack of silicon nitride and siliconoxide. In accordance with embodiments of the present invention however,the inventors have discovered that seasoning the cleaned depositionchamber with a layer of silicon oxide alone offers the best results.

[0044] Another chamber pre-conditioning step in accordance with anembodiment of the present invention is treatment of the seasoned chamberwith a plasma prior to insertion of the wafer, as shown in step 304 b ofFIG. 3. Conventionally, after the chamber in which the barrier layer isto be deposited has been seasoned, the wafer bearing the copper layer isinserted for additional processing. However, in accordance withembodiments of the present invention, it has been discovered thattreatment of the seasoned chamber with a plasma prior to insertion ofthe wafer can reduce hillock formation. Specifically, thispost-seasoning plasma treatment step involves the application of a lowpower density plasma treatment using N₂, N₂O, NH₃, NF₃, or Ar or othernoble gases, alone or in various combinations. For purposes of thisapplication, the term low power density plasma treatment refers totreatment by a plasma at 3.0 W cm² or less for 300 mm wafers. TABLE 1lists typical process parameters which may be employed for apost-seasoning plasma treatment. TABLE 1 PROCESS PARAMETER RANGE ChamberPressure (Torr)  0.1-100 Chamber Power (W)  0.1-2000 Faceplate-to-WaferSpacing (mils) 100-2000 N₂ Gas Flow Rate (sccm) 100-20,000 N₂O Gas FlowRate (sccm) 100-20,000

[0045] FIGS. 4A-B are electron micrographs showing formation of hillocksin copper layers of wafers processed in two chambers subjected todifferent pre-conditioning. FIGS. 4A-B, and others of the instantapplication, show the surface of a silicon nitride layer deposited overa processed copper layer. Because subsequent processing of the Cu layerwill alter its hillock profile, this deposited SiN layer preserves andaccurately mirrors the hillock profile of the underlying Cu layerimmediately after processing.

[0046] For example, FIG. 4A shows an optical micrograph of a surface ofa wafer bearing a blanket Cu layer coated with a nitride layer, in aseasoned chamber that has not been exposed to a post-seasoning plasmatreatment. FIG. 4B shows an optical micrograph of a blanket Cu layercoated with a nitride layer, in a seasoned chamber that has been exposedto a post-seasoning plasma treatment in an ambient of N₂ and N₂O.Comparison of FIGS. 4A and 4B indicates significantly fewer hillockspresent on the surface of the wafer processed in the chamber having thepost-seasoning plasma treatment.

[0047] The post-seasoning plasma treatment just described representsonly one possible embodiment in accordance with the present invention.In alternative embodiments, the post-seasoning plasma may be generatedremotely and then flowed into the processing chamber. In still otheralternative embodiments, the post-seasoning plasma may be generated ingases other than N₂ or N₂O, for example in NF₃ or NH₃, or He or Ar orother noble gases, or combinations thereof.

[0048] Moreover, the post-seasoning plasma treatment just described maybe utilized alone, or in combination with the silicon oxide seasoningstep just described above. Similarly, the silicon oxide seasoning stepcan be utilized with or without the post-seasoning plasma treatment.

[0049] B. CuO Removal

[0050] As described above in connection with step 302 of FIG. 3, duringor following chemical mechanical planarization of the copper layer, athin film of CuO may form. This CuO film exhibits relatively highdielectric properties and may undesirably interfere with conductivity ofthe Cu interconnect metallization structure. Accordingly, during step310 the wafer bearing the Cu layer and the CuO film is typically exposedto a plasma prior to deposition of the barrier layer. This plasma reactswith and removes the CuO film.

[0051] However, exposing the Cu to plasma energy during the CuO filmremoval can impart stress to the Cu layer. Relaxation of the film inresponse to this stress can thereby contribute to formation of hillocks.Accordingly, another approach to reducing hillock incidence is to reducethe energy to which the wafer is exposed immediately prior to and duringthe CuO removal process.

[0052] Prior to exposure to the plasma that removes CuO, the flow ofgases into the process chamber is stabilized. During this gas flowstabilization period, the Cu-bearing wafer is exposed to elevatedtemperatures and can undergo stress and relaxation resulting in hillockformation. Accordingly, one technique employed by embodiments inaccordance with the present invention is to reduce the extent ofphysical contact between the wafer and the wafer heater during this gasflow stabilization phase.

[0053] As discussed below in connection with FIGS. 12A-B, during loadingand unloading of a wafer from the CVD chamber, the wafer is placed uponlift pins which extend upward from the surface of the wafersupport/heater. The lift pins then retract into the surface of thesupport/heater prior to deposition of materials to place the wafer incontact with the surface of the support/heater structure.

[0054] The continuous heating and cooling of a substrate support wouldgive rise to undesirable time delays and temperature variation.Accordingly, a voltage is generally constantly applied to the heater,even between wafer processing steps when the chamber is empty. To reducestress imparted by contact between the substrate and theconstantly-heated heater, during gas flow stabilization prior toformation of the plasma removing CuO, the apparatus may be operated inaccordance with an embodiment of the present invention to place thewafer in contact with only the lift pins, elevated over the surface ofthe heater. This positioning of the wafer reduces physical contactbetween the wafer and the heater, and may potentially reduce by betweenabout 100-150° C. the effective temperature experienced by the wafer.This reduction in the amount of thermal energy imparted to the wafer andthe Cu layer formed thereon reduces the chance of stress relaxation andhillock formation. Immediately prior to actual plasma exposure the liftpins retract into the heater surface and place the back side of thewafer into direct contact with the heater.

[0055]FIG. 5A shows an optical micrograph of a wafer bearing a Cublanket having an overlying deposited nitride layer, where the wafer wasplaced into direct contact with the wafer heater during the entire gasflow stabilization step. FIG. 5B shows an optical micrograph of a waferbearing a deposited Cu blanket layer having an overlying depositednitride layer, that has been supported above the surface of the waferheater on lift pins during the gas flow stabilization period. Comparisonof FIGS. 5A and 5B reveals substantially reduced hillock formation onthe wafer suspended over the heater during stabilization.

[0056] Research has indicated that bombardment of the Cu layer by ionsduring removal of the CuO by plasma exposure also imparts stress andrelaxation in a Cu film, potentially creating hillocks. Thus anotherapproach to reducing hillock formation in accordance with an embodimentof the present invention is to reduce ion bombardment of the Cu filmduring the CuO removal step.

[0057] Increasing the pressure at which the plasma is generated, and thespacing between the wafer and the gas distribution face plate during theCuO plasma removal step, may serve to reduce ion bombardment. This isillustrated in connection with FIGS. 6A-D, which show opticalmicrographs of the surface of a wafer bearing a silicon nitride layerdeposited over a blanket Cu layer that was exposed to plasma undervarious conditions. FIGS. 6A and 6C show edge and center portionsrespectively, of a wafer exposed to a plasma at a pressure of 4.2 torrand an N₂ gas flow of 5000 sccm, with spacing between the gasdistribution face plate and the wafer of about 350 mils (0.35″). FIGS.6B and 6D show edge and center portions respectively, of a wafer exposedto a plasma at a pressure of 8 torr and an N₂ gas flow of 9000 sccm,with a spacing between the gas distribution face plate and the wafer ofabout 560 mil (0.56″). Comparison of FIG. 6A with FIG. 6B, and of FIG.6C with FIG. 6D, indicate that significantly fewer hillocks are presenton the wafer that has been subjected to oxide removal by plasma athigher pressures at larger face plate-to-wafer spacings.

[0058] Still another approach to reducing hillock formation is to reducethe duration of the plasma treatment to remove CuO, such that the waferis exposed to ion bombardment for a shorter period of time. FIG. 7Ashows atomic force micrographs of a surface of a wafer bearing a blanketCu layer after exposure to plasma for 15 seconds to remove CuO. The rmsroughness of the layer of FIG. 7A is 4.8 nm. FIG. 7B shows atomic forcemicrographs of a blanket Cu layer after exposure to plasma under thesame conditions as in FIG. 7A, except for a duration of only 10 seconds.The rms roughness of the layer of FIG. 7B is 4.1 nm, illustrating areduction in the incidence of hillock formation.

[0059] Yet another approach to reducing hillock formation based uponplasma treatment to remove CuO is to control the composition of thegases present in the processing chamber during this plasma exposurestep. For example, it is expected that removal of the CuO by exposure toplasma will be followed by deposition of the nitride barrier layer underplasma conditions. Hence, conventionally the step of removing the CuOthrough exposure to plasma takes place in a similar ambient as thesubsequent deposition step, namely in an ambient containing ammonia(NH₃).

[0060] Typically however, carrier gases are also present in the chamberalong with NH₃ during the step of removing CuO through plasma exposure.In accordance with one embodiment of the present invention, it maytherefore be possible to reduce ion bombardment by performing this CuOremoval step in an ambient comprising NH₃ only. FIGS. 8A-D show opticalmicrographs of the surface of wafers bearing Cu blanket layers havingdeposited nitride layers, after exposure of the Cu layer to plasma undervarious conditions. FIGS. 8A and 8C show optical micrographs of centerand edge portions respectively, of the surface of wafers bearing Cublanket layers after exposure to a plasma for 15 seconds in an ambientof N₂ and NH₃. FIGS. 8B and 8D show optical micrographs of center andedge portions respectively, of the surface of wafers bearing Cu blanketlayers after exposure to a plasma in an ambient of NH₃ only for a longerperiod (20 seconds). Comparison of FIG. 8A with FIG. 8B, and of FIG. 8Cwith FIG. 8D, indicates that significantly fewer hillocks are present onthe wafer exposed to plasma in the lower molecular weight (NH₃ only)ambient.

[0061] Moreover, as the role of the plasma in the CuO removal step issimply to react with and remove a thin layer of material, it may furtherbe possible to substitute gases other than NH₃ during this step, andthereby further reduce the energy of ion bombardment. FIGS. 9A-D showphotographs of a Cu blanket layer after exposure to plasma under variousconditions. FIGS. 9A and 9C show optical micrographs of center and edgeportions respectively, of the surface of wafers bearing Cu blanketlayers having deposited nitride layers, where the Cu layer is exposed toa plasma for 15 seconds in a NH₃ ambient. FIGS. 9B and 9D show opticalmicrographs of center and edge portions respectively, of the surface ofwafers bearing Cu blanket layers having deposited nitride layers, wherethe Cu layer is exposed to a plasma in an ambient comprising molecularhydrogen (H₂) having a substantially lower molecular weight (M.W.=2)than ammonia (M.W.=17). Comparison of FIG. 9A with FIG. 9B, and of FIG.9C with FIG. 9D, reveals significantly fewer hillocks on the waferexposed to the H₂ plasma.

[0062] C. Post-Cu Removal Processes

[0063] As shown in step 312 of FIG. 3, once the barrier layer depositionchamber has been conditioned and the CuO film removed by exposure toplasma, the chamber is operated to expose the wafer to conditions thatresult in deposition of a barrier layer over the Cu layer. In accordancewith embodiments of the present invention, various post-CuO removalprocess parameters may also be controlled to minimize hillock formation.

[0064] Research has indicated that the hillocks grow on the Cu layerprior to deposition of the barrier layer, and that relative stiffness ofthe overlying deposited barrier layer will likely act as a physicalbarrier to inhibit growth of hillocks out of the plane of the Cu layer.This conclusion is supported by the experimental results shown in FIGS.10A-D. FIG. 10A shows an optical micrograph of a surface of a waferbearing a blanket Cu layer prior to exposure of the Cu layer to anyadditional thermal energy. FIG. 10B shows an optical micrograph of a Cublanket layer after the Cu layer has been heated at 400° C. for 60seconds. Comparison of FIGS. 10A and 10B show significant hillockformation in the blanket Cu layer exposed to the thermal treatment.

[0065]FIG. 10C shows an optical micrograph of a surface of a waferbearing a nitride layer deposited over a Cu blanket layer prior to anyheating of the Cu blanket layer. FIG. 10D shows an optical micrograph ofa Cu blanket layer bearing a deposited nitride layer, after the Cu/SiNstack has been exposed to thermal treatment at 450° C. for 60 seconds.Comparison of FIGS. 10C and 10D show little significant hillockformation in the presence of the overlying nitride barrier layer. Thusin accordance with embodiments of the present invention, hillock growthcan be suppressed by forming an overlying nitride layer prior toexposing the copper layer to additional thermal energy.

[0066] In one approach, thermal exposure of the Cu film immediatelyprior to barrier layer deposition may be minimized by reducing the timerequired for stabilization of the process gas. For some period prior toplasma reaction of the reactant gases to form the layer of the barriermaterial over the Cu metallization layer, some or all of the reactantgases may be flowed with the wafer present in the chamber in order tostabilize the gas flow rate. During this pre-deposition gas flowstabilization phase, the wafer is exposed to high temperatures and henceenergy and stress may be imparted to the film. By reducing the durationof this gas flow stabilization phase, for example from 15 sec. to 5 sec.for deposition of a SiN barrier layer on a 200 mm wafer, or from 30 secto 15 sec for deposition of a SiN barrier layer on a 300 mm wafer, theincidence of hillock formation can be substantially suppressed.

[0067] Another approach for reducing hillock formation during barrierlayer deposition is to reduce the temperature at which deposition takesplace. FIG. 11A shows an optical micrograph of the surface of a waferbearing a nitride layer deposited over a Cu blanket layer at atemperature of 400° C. Under these conditions, the nitride layerexhibited an rms roughness of 6.2 nm. FIG. 11B shows an opticalmicrograph of the surface of a wafer bearing a nitride layer depositedover a Cu blanket layer at a temperature of 350° C. for the same periodof time as the wafer of FIG. 11A. Under deposition at these reducedtemperature conditions, the nitride layer exhibited an rms roughness of5.4 nm, a reduction of 10-20% relative to the sample exposed to 400° C.in FIG. 11A. Comparison of FIGS. 11A and 11B reveals that the waferexposed to the lower temperature exhibited less roughness and reducedhillock formation.

[0068] II. Processing Apparatuses

[0069] Embodiments of the invention may be performed in the processingchamber of any suitable processing apparatus, such as the PRODUCER®plasma enhanced chemical vapor deposition (PECVD) apparatus manufacturedby Applied Materials Inc., of Santa Clara, Calif. In a PECVD apparatus,process gases are excited and/or dissociated by the application ofenergy such as radio frequency (RF) energy to form a plasma. The plasmacontains ions of the process gases and reacts at the surface of thesubstrate to form a layer of material.

[0070] An example of a PECVD apparatus is shown in FIG. 12A. FIG. 12Ashows a system 10 including a processing chamber 30, a vacuum system 88,a gas delivery system 89, an RF power supply 5, a heat exchanger system6, a substrate pedestal/heater 32 and a processor 85 among other majorcomponents. A gas distribution manifold (also referred to as an inletmanifold, a face plate, or “showerhead”) 40 introduces process gasessupplied from the gas delivery system 89 into a reaction zone 58 of theprocessing chamber 30. The heat exchange system 6 may employ a liquidheat exchange medium, such as water or a water-glycol mixture, to removeheat from the processing chamber 30 and maintain certain portions of theprocessing chamber 30 at a suitable temperature.

[0071] The gas delivery system 89 delivers gases to the processingchamber 30 via gas lines 92A-C. The gas delivery system 89 includes agas supply panel 90 and gas or liquid or solid sources 91A-C (additionalsources may be added if desired), containing gases (such as SiH₄, ozone,halogenated gases, or N₂) or liquids (such as TEOS) or solids. The gassupply panel 90 has a mixing system that receives the process gases andcarrier gases (or vaporized liquids) from the sources 91A-C. Processgases may be mixed and sent to a central gas inlet 44 in a gas feedcover plate 45 via the supply lines 92A-C (other lines may be present,but are not shown).

[0072] Process gas is injected into processing chamber 30 through thecentral gas inlet 44 in the gas-feed cover plate 45 to a firstdisk-shaped space 48. Heat exchanger passages 79 may be provided in thecover plate 45 to maintain the cover plate 45 at a desired temperature.The process gas passes through passageways (not shown) in a baffle plate(or gas blocker plate) 52 to a second disk-shaped space 54 and then tothe showerhead 40. The showerhead 40 includes a large number of holes orpassageways 42 for supplying the process gas into reaction zone 58.Process gas passes from the holes 42 in the showerhead 40 into thereaction zone 58 between the showerhead 40 and the pedestal 32. Once inthe reaction zone 58, the process gas reacts on the wafer 36. Byproductsof the reaction then flow radially outward across the edge of the wafer36 and a flow restrictor ring 46, which is disposed on the upperperiphery of pedestal 32. Then, the process gas flows through a chokeaperture formed between the bottom of an annular isolator and the top ofchamber wall liner assembly 53 into a pumping channel 60.

[0073] The vacuum system 88 maintains a specified pressure in theprocess chamber 30 and removes gaseous byproducts and spent gases fromthe process chamber 30. The vacuum system 88 includes a vacuum pump 82and a throttle valve 83. Upon entering the pumping channel 60, theexhaust gas is routed around the perimeter of the processing chamber 30,and is evacuated by a vacuum pump 82. The pumping channel 60 isconnected through the exhaust aperture 74 to a pumping plenum 76. Theexhaust aperture 74 restricts the flow between the pumping channel 60and the pumping plenum 76. A valve 78 gates the exhaust through anexhaust vent 80 to the vacuum pump 82.

[0074] The pedestal 32 may be made of ceramic and may include anembedded RF electrode (not shown), such as an embedded molybdenum mesh.A heating element such as a resistive heating element (e.g., an embeddedmolybdenum wire coil) or a coil containing a heating fluid may also bein the pedestal 32. Alternatively or additionally, a cooling element(not shown) may be included in the pedestal 32. The pedestal 32 may bemade from aluminum nitride and is preferably diffusion bonded to aceramic support stem 26 that is secured to a water cooled aluminum shaft28 that engages a lift motor (not shown). The ceramic support stem 26and the aluminum shaft 28 have a central passage that is occupied by anickel rod 25 that transmits low frequency RF power to the embeddedelectrode.

[0075] The pedestal 32 may support the wafer 36 in a wafer pocket 34when the wafer 36 is on the pedestal 32. The pedestal 32 may movevertically and may be positioned at any suitable vertical position. Forexample, when the pedestal 32 is in a lower loading position (slightlylower than at slit valve 56), a robot blade (not shown) in cooperationwith the lift pins 38 and a lifting ring transfers the wafer 36 in andout of chamber 30 through a slit valve 56. The slit valve 56vacuum-seals the processing chamber 30 to prevent the flow of gas intoor out of the processing chamber 30. When the pedestal 32 is disposed ina lower position, the lift pins 38 (which may be stationary) support thewafer 36. The robot blade (not shown) used to transfer the wafer 36 intothe chamber is withdrawn. The wafer 36 may remain on the lift pins 38 sothat the wafer 36 can be processed according to the first process. Thepedestal 32 may rise to raise the wafer 36 off the lift pins 38 onto theupper surface of the pedestal 32 so that the wafer 36 can be heated to asecond temperature suitable for a second process. The pedestal 32 mayfurther raise the wafer 36 so that the wafer 36 is any suitable distancefrom the gas distribution manifold 40.

[0076] Motors and optical sensors (not shown) may be used to move anddetermine the position of movable mechanical assemblies such as thethrottle valve 83 and the pedestal 32. Bellows (not shown) attached tothe bottom of the pedestal 32 and the chamber body 11 form a movablegas-tight seal around the pedestal 32. The processor 85 controls thepedestal lift system, motors, gate valve, plasma system, and othersystem components over control lines 3 and 3A-C. The processor 85 mayexecute computer code for controlling the apparatus. A memory 86 coupledto the processor 85 may store the computer code. The processor 85 mayalso control a remote plasma system 4. In some embodiments, the remoteplasma system 4 may include a microwave source and may be used to form aplasma that can be used to clean the process chamber 30 or process thewafer 36. Computer code may be used to control chamber components thatmay be used to load the wafer 36 onto the pedestal 32, lift the wafer 36to a desired height in the chamber 30, control the spacing between thewafer 36 and the showerhead 40, and keep the lift pins 38 above theupper surface of the pedestal 32.

[0077]FIG. 12B is an illustrative block diagram of the hierarchicalcontrol structure of the system control software, computer program 150,according to a specific embodiment. A processes for depositing a film,performing a clean, or performing reflow or drive-in can be implementedusing a computer program product that is executed by the processor 85.The computer program code can be written in any conventional computerreadable programming language, such as 68000 assembly language, C, C++,Pascal, Fortran, or other language. Suitable program code is enteredinto a single file, or multiple files, using a conventional text editorand is stored or embodied in a computer-usable medium, such as thesystem memory.

[0078] If the entered code text is in a high-level language, the code iscompiled, and the resultant compiler code is then linked with an objectcode of precompiled WINDOWS™ library routines. To execute the linkedcompiled object code, the user invokes the object code, causing thecomputer system to load the code in memory, from which the CPU reads andexecutes the code to configure the apparatus to perform tasks identifiedin the program.

[0079] A user enters a process set number and process chamber numberinto a process selector subroutine 153 by using the light pen to selecta choice provided by menus or screens displayed on a CRT monitor. Theprocess sets, which are predetermined sets of process parametersnecessary to carry out specified processes, are identified by predefinedset numbers. The process selector subroutine 153 identifies the desiredset of process parameters needed to operate the process chamber forperforming the desired process. The process parameters for performing aspecific process relate to process conditions such as, for example,process gas composition and flow rates, temperature, pressure, plasmaconditions such as magnetron power levels (and alternatively to or inaddition to high- and low-frequency RF power levels and thelow-frequency RF frequency, for embodiments equipped with RF plasmasystems), cooling gas pressure, and chamber wall temperature. Theprocess selector subroutine 153 controls what type of process (e.g.deposition, wafer cleaning, chamber cleaning, chamber gettering,reflowing) is performed at a certain time in the chamber. In someembodiments, there may be more than one process selector subroutine. Theprocess parameters are provided to the user in the form of a recipe andmay be entered utilizing the light pen/CRT monitor interface.

[0080] A process sequencer subroutine 155 has program code for acceptingthe identified process chamber and process parameters from the processselector subroutine 153, and for controlling the operation of thevarious process chambers. Multiple users can enter process set numbersand process chamber numbers, or a single user can enter multiple processset numbers and process chamber numbers, so process sequencer subroutine155 operates to schedule the selected processes in the desired sequence.Preferably, the process sequencer subroutine 155 includes program codeto perform the tasks of (i) monitoring the operation of the processchambers to determine if the chambers are being used, (ii) determiningwhat processes are being carried out in the chambers being used, and(iii) executing the desired process based on availability of a processchamber and the type of process to be carried out.

[0081] Conventional methods of monitoring the process chambers, such aspolling methods, can be used. When scheduling which process is to beexecuted, the process sequencer subroutine 155 can be designed to takeinto consideration the present condition of the process chamber beingused in comparison with the desired process conditions for a selectedprocess, or the “age” of each particular user-entered request, or anyother relevant factor a system programmer desires to include fordetermining scheduling priorities.

[0082] Once the process sequencer subroutine 155 determines whichprocess chamber and process set combination is going to be executednext, the process sequencer subroutine 155 initiates execution of theprocess set by passing the particular process set parameters to achamber manager subroutine 157 a-c which controls multiple processingtasks in the process chamber according to the process set determined bythe process sequencer subroutine 155. For example, the chamber managersubroutine 157 a has program code for controlling CVD and cleaningprocess operations in the process chamber. Chamber manager subroutine157 also controls execution of various chamber component subroutineswhich control operation of the chamber components necessary to carry outthe selected process set. Examples of chamber component subroutines aresubstrate positioning subroutine 160, process gas control subroutine163, pressure control subroutine 165, heater control subroutine 167,plasma control subroutine 170, endpoint detect control subroutine 159,and gettering control subroutine 169.

[0083] Depending on the specific configuration of the CVD chamber, someembodiments include all of the above subroutines, while otherembodiments may include only some of the subroutines. Those havingordinary skill in the art would readily recognize that other chambercontrol subroutines can be included depending on what processes are tobe performed in the process chamber.

[0084] In operation, the chamber manager subroutine 157 a selectivelyschedules or calls the process component subroutines in accordance withthe particular process set being executed. The chamber managersubroutine 157 a schedules the process component subroutines much likethe process sequencer subroutine 155 schedules which process chamber andprocess set are to be executed next. Typically, the chamber managersubroutine 157 a includes the steps of monitoring the various chambercomponents, determining components to be operated based on the processparameters for the process set to be executed, and initiating executionof a chamber component subroutine responsive to the monitoring anddetermining steps.

[0085] Operation of particular chamber component subroutines will now bedescribed with reference to FIGS. 12A-B. The substrate positioningsubroutine 160 comprises program code for controlling chamber componentsthat are used to load the substrate onto the heater 32 and, optionally,to lift the substrate to a desired height in the chamber to control thespacing between the substrate and the gas distribution face plate. Whena substrate is loaded into the process chamber 30, the heater 32 islowered to receive the substrate and then the heater 32 is raised to thedesired height. In operation, the substrate positioning subroutine 160controls movement of the heater 32 in response to process set parametersrelated to the support height that are transferred from the chambermanager subroutine 157 a. As discussed above, in certain embodiments thesubstrate positioning subroutine 160 may be used to vary the height ofthe heater, and thus the spacing between the heater and the gasdistribution plate 40, during the post-seasoning plasma treatment toheat the face plate and thereby reduce the steepness of the thermalgradient between the face plate and a wafer positioned on the heater. Asalso discussed above, in certain other embodiments the substratepositioning subroutine 160 may be used to suspend the substrate on liftpins at a height over the heater surface during gas stabilization,thereby reducing the thermal budget of the wafer during this step.

[0086] Process gas control subroutine 163 controls the character of theprocess gases flowed into the chamber. Process gas control subroutine163 can be designed to vary over time the relative flow rates of thevarious process gases inlet to the chamber, and hence the pressurewithin the chamber. Such variation in pressure can result in desirableprocessing to suppress formation of hillocks, as has been describedabove.

[0087] The process gas control subroutine 163 has program code forcontrolling process gas composition and flow rates, for example to flowonly ammonia or low molecular weight gases to reduce ion bombardmentduring the plasma exposure step to remove CuO. The process gas controlsubroutine 163 controls the state of safety shut-off valves, and alsoramps the mass flow controllers up or down to obtain the desired gasflow rate. Typically, the process gas control subroutine 163 operates byopening the gas supply lines and repeatedly (i) reading the necessarymass flow controllers, (ii) comparing the readings to the desired flowrates received from the chamber manager subroutine 157 a, and (iii)adjusting the flow rates of the gas supply lines as necessary.Furthermore, the process gas control subroutine 163 includes steps formonitoring the gas flow rates for unsafe rates, and activating thesafety shut-off valves when an unsafe condition is detected. Alternativeembodiments could have more than one process gas control subroutine,each subroutine controlling a specific type of process or specific setsof gas lines.

[0088] In some processes, an inert gas, such as nitrogen or helium, isflowed into the chamber to stabilize the pressure in the chamber beforereactive process gases are introduced. For these processes, process gascontrol subroutine 163 is programmed to include steps for flowing theinert gas into the chamber for an amount of time necessary to stabilizethe pressure in the chamber, and then the steps described above would becarried out.

[0089] The pressure control subroutine 165 comprises program code forcontrolling the pressure in the chamber by regulating the aperture sizeof the throttle valve in the exhaust system of the chamber. The aperturesize of the throttle valve is set to control the chamber pressure at adesired level in relation to the total process gas flow, the size of theprocess chamber, and the pumping set-point pressure for the exhaustsystem. When the pressure control subroutine 165 is invoked, the desiredor target pressure level is received as a parameter from the chambermanager subroutine 157 a. The pressure control subroutine 165 measuresthe pressure in the chamber by reading one or more conventional pressuremanometers connected to the chamber, compares the measure value(s) tothe target pressure, obtains proportional, integral, and differential(“PID”) values corresponding to the target pressure from a storedpressure table, adjusting the throttle valve according to these values.

[0090] Alternatively, the pressure control subroutine 165 can be writtento open or close the throttle valve to a particular aperture size, i.e.a fixed position, to regulate the pressure in the chamber. Controllingthe exhaust capacity in this way does not invoke the feedback controlfeature of the pressure control subroutine 165.

[0091] The heater control subroutine 167 comprises program code forcontrolling the current to a heating unit that is used to heat thesubstrate. The heater control subroutine 167 is also invoked by thechamber manager subroutine 157 a and receives a target, or set-point,temperature parameter. As discussed above, in certain embodiments thistemperature preset may be zero during the barrier layer deposition stepto reduce thermal stress on the wafer. The heater control subroutine 167measures the temperature by measuring voltage output of a thermocouplelocated in the heater, comparing the measured temperature to theset-point temperature, and increasing or decreasing current applied tothe heating unit to obtain the set-point temperature. The temperature isobtained from the measured voltage by looking up the correspondingtemperature in a stored conversion table, or by calculating thetemperature using a fourth-order polynomial. The heater controlsubroutine 167 includes the ability to gradually control a ramp up ordown of the heater temperature. This feature helps to reduce thermalcracking in the ceramic heater. Additionally, a built-in fail-safe modecan be included to detect process safety compliance, and can shut downoperation of the heating unit if the process chamber is not properly setup.

[0092] The plasma control subroutine 170 comprises program code forcontrolling the application of rf power that is used to strike andmaintain a plasma within the chamber. As discussed above, in connectionwith certain embodiments the plasma control subroutine 170 may directthe application of a power to generate a low density plasma within thechamber following cleaning and seasoning. Plasma control subroutine 170may also direct the application of power to generate the subsequentplasmas utilized for CuO removal and barrier layer deposition.

[0093] To summarize: utilizing the techniques of the present inventionalone or in combination, the incidence of hillock formation in copperlayers of processed semiconductor wafers can be significantly reduced.This result was accomplished by controlling a first set of processparameters to condition the barrier layer deposition chamber prior toinsertion of the wafer bearing the copper layer. Examples of this firstset of process parameters include but are not limited to seasoning thedeposition chamber with an oxide layer, and post-seasoning treatment ofthe chamber with plasma to densify the seasoning layer present therein.

[0094] A second set of process parameters may be controlled to minimizethe energy to which the copper layer is exposed during removal of anoverlying residual copper oxide layer. Examples of this second set ofprocess parameters include but are not limited to the pressure andshowerhead-to-wafer spacing during generation of an oxide removalplasma, the composition of gases present during this plasma exposurestep, and the duration and position of the wafer during the gas flowstabilization step immediately preceding plasma formation.

[0095] Finally, a third set of process parameters may be controlled tominimize the thermal budget to which the copper layer is exposed duringformation of the barrier layer. Examples of this third set of processparameters include but are not limited to the temperature preset of thewafer heater, the duration of gas flow stabilization, and the depositiontemperature.

[0096] The above-described experimental results were obtained utilizinga Applied Materials PRODUCER® system. As a person of ordinary skill inthe art would understand however, techniques for minimizing hillockformation in accordance with embodiments of the present invention arenot limited to this particular apparatus, and could be employed inconjunction with other systems.

[0097] The above description is illustrative and not restrictive, and assuch the process parameters listed above should not be limiting to theclaims as described herein. For example, the various techniques employedfor reducing hillock formation are separate and distinct, and thus itshould be recognized that they may be employed alone or in variouscombinations to reduce the incidence of hillock formation.

[0098] In addition, while the embodiment described above discussesremoval of the CuO layer through plasma exposure in the same chamber assubsequent deposition of the barrier layer, this is not required by thepresent invention. Alternative embodiments in accordance with thepresent invention could remove the CuO film through plasma exposure in aseparate processing chamber, with transfer of the wafer to the barrierdeposition chamber accomplished under non-oxidizing conditions toprevent the CuO film from re-forming. In such an embodiment, twodistinct periods of gas flow stabilization would be used, with theduration of one or more of these periods reduced to minimize stress onthe wafer. In addition, the inserted wafer could be suspended above theheater surface on lift pins during one or both of these periods of gasflow stabilization.

[0099] Moreover, while the invention has been illustrated above withparticular reference to the reduction of the incidence of hillockformation in copper metallization layers following formation of abarrier layer comprising silicon nitride, one of ordinary skill in theart would recognize that the present invention is not limited to thisparticular type of dielectric barrier layer. Methods and apparatuses inaccordance with embodiments of the present invention apply to siliconnitride, silicon carbide, SiCN, oxygen doped SiC, and other dielectricbarrier materials such as the BLOK® and Black Diamond® materialsproduced by Applied Materials, Inc.

[0100] While the above discussion has focused upon the reduction ofincidence of hillock formation during the formation of coppermetallization layers utilized in the formation of damascene interconnectstructures, the present invention is not limited to this particular typeof metallization material or application. Rather, embodiments inaccordance with the present invention are generally applicable tocontrolling the microstructure of other metals utilized in othermetallization schemes.

[0101] The scope of the invention may be determined with reference tothe above description and to the appended claims, along with their fullscope of equivalents.

What is claimed is:
 1. A method of preconditioning a processing chamberthat is to be utilized to form a barrier layer on top of a copper layer,the method comprising: causing a seasoning layer consisting of siliconoxide to be deposited on exposed surfaces of a processing chamber priorto introduction of a substrate bearing a copper layer.
 2. The method ofclaim 1 further comprising: introducing a substrate bearing a copperlayer into the processing chamber; and forming a barrier layer over thecopper layer.
 3. The method of claim 2 wherein forming the barrier layercomprises depositing a barrier layer selected from the group consistingof SiCN, oxygen doped SiC, SiN, TiN, Ta, TaN, Ta/TaN, BLOK®, and BlackDiamond®.
 4. A method of preconditioning a processing chamber that is tobe utilized to form a barrier layer on top of a copper layer, the methodcomprising: exposing a processing chamber to a plasma prior to prior tointroduction of a substrate bearing a copper layer.
 5. The method ofclaim 4 wherein the plasma is generated in the processing chamber. 6.The method of claim 4 wherein the plasma is generated remote from theprocessing chamber.
 7. The method of claim 4 wherein the plasma isgenerated from a gas comprising N₂, N₂O, NH₃, or a noble gas.
 8. Themethod of claim 4 further comprising: introducing a substrate bearing acopper layer into the processing chamber; and forming a barrier layerover the copper layer.
 9. The method of claim 8 wherein forming thebarrier layer comprises depositing a barrier layer selected from thegroup consisting of SiCN, oxygen doped SiC, SiN, TiN, Ta, TaN, Ta/TaN,BLOK®, and Black Diamond®.
 10. The method of claim 8 further comprising:causing a substrate support supporting the substrate in the chamber tomove away from a gas distribution faceplate prior to receiving thesubstrate.
 11. A method of preconditioning a processing chamber that isto be utilized to form a barrier layer on top of a copper layer, themethod comprising: causing a seasoning layer consisting of silicon oxideto be deposited on exposed surfaces of a processing chamber prior tointroduction of a substrate bearing a copper layer; and exposing theseasoning layer to a plasma prior to introduction of a substrate bearinga copper layer.
 12. The method of claim 11 wherein the plasma isgenerated in the processing chamber.
 13. The method of claim 11 whereinthe plasma is generated remote from the processing chamber.
 14. Themethod of claim 13 wherein the plasma is generated from a gas comprisingN₂, N₂O, NH₃, NF₃, or a noble gas.
 15. The method of claim 11 furthercomprising: introducing a substrate bearing a copper layer into theprocessing chamber; and forming a barrier layer over the copper layer.16. The method of claim 15 further comprising: causing a substratesupport supporting the substrate in the chamber to move away from a gasdistribution faceplate prior to receiving the substrate.
 17. The methodof claim 15 wherein forming the barrier layer comprises depositing abarrier layer selected from the group consisting of SiN, TiN, Ta, TaN,Ta/TaN, SiCN, oxygen doped SiC, BLOK®, and Black Diamond®.
 18. Asubstrate processing apparatus comprising: a processing chamber; a gasdistribution system configured to receive and deliver gases to a gasdistribution face plate located proximate to the substrate heater in theprocessing chamber; a substrate heater configured to support a substratewithin the processing chamber and moveable relative to the gasdistribution face plate; a controller configured to control the gasdelivery system, the RF power system, and the substrate support; and amemory, coupled to the controller, comprising a computer-readable mediumhaving a computer-readable program embodied therein for directingoperation of the substrate processing apparatus, the computer-readableprogram including: (i) a first set of instructions for controlling thegas delivery system to deliver to the gas distribution face plate afirst gas flow resulting in formation of a seasoning layer consisting ofsilicon oxide in the chamber and prior to insertion of a substrate intothe chamber.
 19. The substrate processing apparatus of claim 18 whereinthe computer-readable program further comprises: (ii) a second set ofcomputer instructions for controlling the gas delivery system to deliverto the gas distribution face plate a second gas flow after formation ofa seasoning layer in the chamber and prior to insertion of a substrateinto the chamber; and (iii) a third set of instructions for controllingthe RF power system to form a low density first plasma within thechamber from the second gas flow.
 20. The substrate processing apparatusof claim 19 wherein the computer-readable program further comprises:(iv) a fourth set of instructions for controlling the substrate heaterto move toward the gas distribution face plate during formation of thefirst plasma, and to move away from the gas distribution face plateprior to receiving a substrate.